Specification
Component |
Concentration |
Balance |
Ammonia |
10-500 ppm |
Air or Nitrogen |
Chlorine |
2-1000 ppm |
Nitrogen |
Carbon Monoxide |
10-2000 ppm |
Air or Nitrogen |
Ethylene Oxide |
5-100 ppm |
Nitrogen |
Hydrogen Cyanide |
5-20 ppm |
Nitrogen |
Hydrogen Chlorine |
3-1000 ppm |
Nitrogen |
Hydrogen Sulfide |
5 ppm - 1% vol. |
Air or Nitrogen |
Nitric Oxide |
5-900 ppm |
Nitrogen |
Nitrogen Dioxide |
3-200 ppm |
Air or Nitrogen |
Phosphine |
0.5-15 ppm |
Nitrogen |
Silane |
5-10 ppm |
Nitrogen |
Component |
Concentration |
Balance |
Benzene |
1-5 ppm |
Air |
Butane |
10 ppm - 0.9% vol. |
Air |
Carbon Dioxide |
50 ppm 100% vol. |
Air or Nitrogen |
Ethylene |
10 ppm -1.35% vol. |
Air |
Helium |
100% vol. |
N/A |
Hexane |
10 ppm- 0.48% vol. |
Air |
Hydrogen |
10 ppm -2.0% vol. |
Air or Nitrogen |
Isobutylene |
10 ppm - 100 ppm |
Air |
Methane |
10 ppm - 2.5% vol. |
Air or Nitrogen |
Methyl Chloride |
10 ppm -300 ppm |
Air |
Methylene Chloride |
10 ppm -200 ppm |
Air |
Oxygen |
0.4% - 100% vol. |
Nitrogen |
Pentane |
10 ppm - 0.75% vol. |
Air |
Propane |
10 ppm - 1.1% vol. |
Air |
Propylene |
50 ppm - 5.6% vol. |
Nitrogen |
Toluene |
10 ppm - 100 ppm |
Air or Nitrogen |
Zero Air |
20.9% Oxygen |
Nitrogen |
Nitrogen |
100% vol. |
N/A |